Piezoresponse Force Microscopy Study of Ferroelectric BaTiO3 Thin Film Directly Deposited on Si(001) by Magnetron Sputtering

Hongliang Lu,Shuangqi Song,Xiaofeng Gu,Shuli He,Chonglin Chen,Gangbing Song,Zhonghou Cai,Haiming Guo,Hongjun Gao,Li Sun
DOI: https://doi.org/10.4028/www.scientific.net/jnanor.22.23
2013-01-01
Journal of Nano Research
Abstract:Direct integration of ferroelectrics with semiconductors is critical to lower the cost and simplify the production procedures for data storage/processing components and miniature sensor/actuator development. By optimizing magnetron sputtering parameters, highly <001> preferential growth of BaTiO3 thin films with reproducible ferroelectric responses have been achieved on Si (001) substrates. The thin film ferroelectric characteristics were systematically studied by piezoresponse force microscopy, and a piezoelectric coefficient d33 of 24pm/V has been measured. It is found that the scanning tip sidewall angle and cantilever tilt affect the contour and size of polarized area.
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