A comparative study of Ni75Fe25 microcomponents fabricated by microelectroforming and micromolding
Bo Zhou,Bo Su,Min Li,Aijun Zhang,Jiesheng Han,Junhu Meng
DOI: https://doi.org/10.1016/j.jmatprotec.2020.116997
IF: 6.3
2021-04-01
Journal of Materials Processing Technology
Abstract:NiFe alloy microcomponents are widely used in electromagnetic devices and microelectromechanical systems due to high saturation magnetization and low coercivity. In this paper, freestanding Ni75Fe25 microcomponents are fabricated by both microelectroforming and micromolding. The microstructure, microhardness, and magnetic property of Ni75Fe25 microcomponents fabricated by the two methods are systematically investigated. The microstructure is characterized by X-ray diffraction, transmission electron microscopy, and electron backscatter diffraction. The magnetic property is examined by a vibrating sample magnetometer. The formability of those two methods is evaluated by the minimum feature size and maximum aspect ratio that can be achieved. The results show that nanocrystalline and microcrystalline Ni75Fe25 microcomponents with a FCC Ni3Fe phase are fabricated by microelectroforming and micromolding, respectively. Compared with micromolded Ni75Fe25 microcomponents, microelectroformed ones have higher dimensional precision, lower surface roughness, greater microhardness, and higher saturation magnetization because of the nanosized grains, whereas micromolded Ni75Fe25 microcomponents have smaller feature size, larger aspect ratio, and lower coercivity.
materials science, multidisciplinary,engineering, manufacturing, industrial