Correlation Between MR-DCIV Current and High-Voltage-stress-induced Degradation in LDMOSFETs

Yandong He,Lin Han,Ganggang Zhang,Xing Zhang
DOI: https://doi.org/10.1109/ispsd.2013.6694426
2013-01-01
Abstract:MR-DCIV current has demonstrated the nondestructive capability to profile the interface states along the channel, accumulation and STI regions in high-voltage LDMOSFET. The correlation between interface state and MR-DCIV current has been studied under high voltage stresses in LDMOSFETs. Our study results show that RON degradation is mainly affected by newly-generated interface states in the STI region. Compare to the PBTI with higher gate voltage, OFF-state stress with higher drain voltage would become the worst degradation condition in an STI-based nLDMOSFETs.
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