Weak closed-loop adjusting of wide-range micro-machined accelerometer's nonlinearity

Yong-kang TAO,Yun-feng LIU,Jing-xin DONG
DOI: https://doi.org/10.3969/j.issn.1005-6734.2013.05.025
2013-01-01
Abstract:Wide-range micro-machined accelerometer is in urgent demand for high dynamic integrated navigation system such as guided projectiles. Due to sensing element's large deformation at open-loop status, the nonlinearity of the beam's stiffness, differential capacitor and capacitance detection circuit would lead to large full-scale measurement errors. This paper presents a simple method by using electrostatic force of weak closed-loop to improve the nonlinearity of wide-range accelerometer, which could improve the measurement accuracy and dynamic range. Simulation and principle proof test have demonstrated the effectiveness of the method. Based on this method, a wide-range micro-machined accelerometer using﹢5 V supply is designed, in which the resolution is superior than 2 mg, the 2 h bias stability is 5 mg, and the nonlinearity within ±200 g input is 0.68%.
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