Fabrication of linearly polarized blue LED using nanoimprint lithography

李万永,韩彦军,罗毅
DOI: https://doi.org/10.16136/j.joel.2013.06.016
2013-01-01
Abstract:In this paper, a new method of accurate calculation of the polarization ratio (PR) and the fabrication of linearly polarized blue LED based on nanoimprint lithography of Al grating are proposed. Taking the lambertian emission pattern of LED into consideration, the PR ratio is calculated as the ratio of the light intensity of the transmitted TM mode to that of the transmitted TE and TM modes through the grating within the half-plane incident angle. Based on this method, the effects of the factors, such as the grating material, grating period, fill factor, grating height, on the PR ratio are analyzed. The results show that by using Al grating, the PR ratio is almost equal to 1, when the grating period, fill factor and height are 150 mm, 0.5 and 120 nm, respectively. In addition, the inductively coupled plasma etching of the Al grating is optimized. The experiment results indicate that the polarization extinction ratio (PER) of blue LED is substantially increased from 1.0:1 to 2.2:1.0.
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