Fabrication of Polarization Independent Gratings Made on Multilayer Dielectric Thin Film Substrates

Shen Biyao,Zeng Lijiang,Li Lifeng,Yan Hong
DOI: https://doi.org/10.11884/hplpb201527.111013
2015-01-01
High Power Laser and Particle Beams
Abstract:We briefly present design parameters and fabrication procedures of polarization independent gratings made on multilayer dielectric thin film substrates for spectral beam combining applications. In the wavelength range of 1.044 m to 1.084 m the -1st Littrow order average diffraction efficiencies of TE polarization and TM polarization are 89.7% and 93.8% respectively.
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