Soft Magnetic Property and High-Frequency Permeability of [fe80ni20–o/tio2]n Multilayer Thin Films

H. Geng,J. Q. Wei,Z. W. Wang,S. J. Nie,H. Z. Guo,L. S. Wang,Y. Chen,G. H. Yue,D. L. Peng

DOI: https://doi.org/10.1016/j.jallcom.2013.04.128

IF: 6.2

2013-01-01

Journal of Alloys and Compounds

Abstract:Multilayer thin films with excellent magnetic property and high-frequency permeability possess a significant position in electromagnetic miniaturization devices applied in GHz range. In this work, by controlling the alternately magnetron sputtering time at room temperature, we fabricated [Fe80Ni20-O/TiO2](n) multilayer thin films with different TiO2 interlayer thicknesses (t = 0.25-4 nm) and fixed Fe80Ni20-O layer thickness without applying inducing magnetic field. The static and dynamic magnetic properties of these films were investigated and evident in-plane uniaxial magnetic anisotropy field can be adjusted in a broad range only by changing the thickness of the TiO2 interlayer. When the t increases gradually from 0.25 to 4 nm, the resistivity and in-plane uniaxial magnetic anisotropy field increase monotonically. In particular, by controlling the thickness of each TiO2 interlayer to an optimized value, good soft magnetic property and high-frequency performances in GHz range have been observed. (C) 2013 Elsevier B.V. All rights reserved.