Micro cutting of V-shaped cylindrical grating template for roller nano-imprint

Gonghao Li,Zongwei Xu,Fengzhou Fang,Wei Wu,Xiaodong Xing,Wanli Li,Hongzhong Liu
DOI: https://doi.org/10.1016/j.jmatprotec.2012.12.010
IF: 6.3
2013-01-01
Journal of Materials Processing Technology
Abstract:The roller nano-imprint technology is considered as efficient and low cost method for the large scale micro-pitch grating fabrication. The surface quality of the V-shaped grooves for roller grating template developed by diamond tool cutting process is investigated. The surface quality of the micro V-shaped grating is optimized with minimized burr formation by optimizing the cutting tool's shape design and the micro-cutting process, based on the chip morphology and non-free chip interference analyses. Burr shows different variation with the grating pitch of 10–20μm and less than 2μm. The burr formation mechanism for V-shaped micro-cutting is studied by material (H62 Copper) metallography and homogeneity analyses. Finally, high precision grating template with various pitches is successfully achieved.
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