Fabrication of Micro-Nano Hierarchical Grating Using Revolving Trajectory of Nanoindenter

Jiqiang Wang,Wenhan Zhu,Aoxiang Zhang,Yongda Yan,Hu Huang,Yanquan Geng,Chen Li
DOI: https://doi.org/10.1016/j.jmapro.2024.07.082
IF: 5.684
2024-01-01
Journal of Manufacturing Processes
Abstract:Structural colors that generated by the interaction between incident light and micro-nano structures are favored for their long-term stability and high saturation. Fabrication of micro-nano structures is vital for generating structural color. In this study, micro-nano hierarchical gratings are machined by controlling the tool trajectory on a home-made machine tool. For the complex interaction between the tool and the workpiece during machining, a numerical model of grating surface morphology is established to predict the surface geometry of the microstructure and the cross-section of the nanograting. The effects of the tool installation state, initial cutting depth and tool trajectory on the surface morphology are analyzed. Furthermore, the machining process of single row hierarchical grating with edge-forward clockwise machining trajectory is investigated. The effects of initial cutting depth, cutting speed, vibration amplitude and phase difference on the edge morphology of micro-grating and consistency of nanograting are analyzed. An optimal parameter for machining high-quality micro-nano hierarchical grating on aluminum alloy sample is obtained based on these results. The findings in this study provide a good instruction for fabricating micro-nano hierarchical grating that can be used to generate structural colors.
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