Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Generation mechanisms of laser-induced periodic nanostructures on surfaces of microgrooves

Self‐Aligned Laser‐Induced Periodic Surface Structures for Large‐Area Controllable Nanopatterning

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Compound Structures of Periodic Holes and Curved Ripples Fabricated by the Interference Between the Converging Surface Plasmon Polaritons and Femtosecond Laser

Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds

Surface structures induced by ultrashort laser pulses: Formation mechanisms of ripples and grooves

Femtosecond Laser Processing for Multi-Functional Hierarchical Micro/nano Structures on Curved Surfaces

Evolution of Femtosecond Laser-Induced Periodic Structures: from Nanoholes to Regular Structures

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

The development of femtosecond laser-induced periodic nanostructures and their optical properties

Generation of Periodic Micro- and Nano-Structures by Parameter-Controlled Three-Beam Laser Interference Technique

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Generation of Supra-Wavelength Grooves in Femtosecond Laser Surface Structuring of Silicon

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Self‐Organized Periodic Microholes Array Formation on Aluminum Surface Via Femtosecond Laser Ablation Induced Incubation Effect

Fabrication of Nanostructures by Laser Optical Focusing

Flexible Gray‐Scale Surface Patterning Through Spatiotemporal‐Interference‐Based Femtosecond Laser Shaping

Hierarchical microtextures generated by pulsed-laser manufacturing for surface geometry modulation

Nanoscale Material Redistribution Induced by Spatially Modulated Femtosecond Laser Pulses for Flexible High-Efficiency Surface Patterning.

Deposition and Melting Behaviors for Formation of Micro/nano Structures from Nanostructures with Femtosecond Pulses