Abstract:Abstract Laser processing implies the generation of a material function defined by the shape and the size of the induced structures, being a collective effect of topography, morphology, and structural arrangement. A fundamental dimensional limit in laser processing is set by optical diffraction. Many material functions are yet defined at the micron scale, and laser microprocessing has become a mainstream development trend. Consequently, laser microscale applications have evolved significantly and developed into an industrial grade technology. New opportunities will nevertheless emerge from accessing the nanoscale. Advances in ultrafast laser processing technologies can enable unprecedented resolutions and processed feature sizes, with the prospect to bypass optical and thermal limits. We will review here the mechanisms of laser processing on extreme scales and the optical and material concepts allowing us to confine the energy beyond the optical limits. We will discuss direct focusing approaches, where the use of nonlinear and near-field effects has demonstrated strong capabilities for light confinement. We will argue that the control of material hydrodynamic response is the key to achieve ultimate resolution in laser processing. A specific structuring process couples both optical and material effects, the process of self-organization. We will discuss the newest results in surface and volume self-organization, indicating the dynamic interplay between light and matter evolution. Micron-sized and nanosized features can be combined into novel architectures and arrangements. We equally underline a new dimensional domain in processing accessible now using laser radiation, the sub-100-nm feature size. Potential application fields will be indicated as the structuring sizes approach the effective mean free path of transport phenomena.

Surface Nanostructuring Via Femtosecond Lasers

Evolution of Femtosecond Laser-Induced Periodic Structures: from Nanoholes to Regular Structures

Femtosecond pulse train-facilitated periodic nanostructuring on TiN films via laser-oxidation

Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

The double edged sword of femtosecond laser induced periodic surface structures for sub diffraction and high efficient nanotexturing

Key role of surface plasmon polaritons in generation of periodic surface structures following single-pulse laser irradiation of a gold step edge

Phenomena and mechanisms of single beam femtosecond laser induced periodic microstructures

Cylindrically Focused Nonablative Femtosecond Laser Processing of Long‐Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency

Fabrication of Nanostructures by Laser Optical Focusing

Formation of Deep-Subwavelength Structures on Organic Materials by Femtosecond Laser Ablation

Laser‐Induced Reversible and Irreversible Surface Nanostructuring

Periodic surface nanostructures induced by orthogonal femtosecond laser pulses on tungsten

Advances in ultrafast laser structuring of materials at the nanoscale

Femtosecond laser induced periodic surface structures on crystals: Formation, evolution and application

Ultrafast laser-induced morphological transformations

Generation of periodic nanobumps through a double-scan method with femtosecond lasers

Creation of Material Functions by Nanostructuring

Nano-Patterning by Pulsed Laser Irradiation in Near Field

Micro-and nano-structures on metal induced by femtosecond laser radiation

Direct femtosecond laser surface structuring with complex light beams generated by q-plates

Micro/Nano Periodic Surface Structures and Performance of Stainless Steel Machined Using Femtosecond Lasers