Nano-Patterning by Pulsed Laser Irradiation in Near Field

M. H. Hong,Y. Lin,G. X. Chen,L. S. Tan,Q. Xie,B. Lukyanchuk,L. P. Shi,T. C. Chong
DOI: https://doi.org/10.1088/1742-6596/59/1/014
2007-01-01
Abstract:Pulsed laser irradiation in near field is one of effective ways to break optical diffraction limit for surface nano-structuring. Femtosecond laser (400 nm, 100 fs) irradiation through near-field scanning optical microscopy for sub-50 nm resolution is studied. Application of transparent particles' mask by the self-assembly for nano-hole array fabrication is also investigated. It is attributed to light enhancement in near field through the particles.
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