Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Direct Femtosecond Laser Nanopatterning of Glass Substrate by Particle-Assisted Near-Field Enhancement

Single-step maskless nano-lithography on glass by femtosecond laser processing

Near-Field-Regulated Ultrafast Laser Supra-Wavelength Structuring Directly on Ultrahard Metallic Glasses

Femtosecond laser microfabrication of micro-optic elements in glass

Nanofabrication in transparent materials with a femtosecond pulse laser

Three-dimensional Nanostructuring of Transparent Materials by the Femtosecond Laser Irradiation

Nanoscale investigations of femtosecond laser induced nanogratings in optical glasses

Formation of Si Nanocrystals in Glass by Femtosecond Laser Micromachining

Ultrafast Laser Inducing Continuous Periodic Crystallization in the Glass Activated via Laser‐Prepared Crystallite‐Seeds

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Mechanisms and Applications of Femtosecond Laser Induced Nanostructures

Space-Selective Modification of Glass by Using Femtosecond Laser

Femtosecond laser micromachining and microfabrication in transparent materials

Femtosecond pulsed laser micro-machining of glass substrates with application to microfluidic devices

Shape- and Size-Controllable Microstructure on Glass Surface Induced by Femtosecond Laser Irradiation.

Formation of In-Volume Nanogratings in Glass Induced by Spatiotemporally Focused Femtosecond Laser Pulses

Femtosecond laser modification of glass

Direct Femtosecond Laser Processing for Generating High Spatial Frequency LIPSS (HSFL) on Borosilicate Glasses with Large-Area Coverage

Microstructures Induced by Femtosecond Laser Pulses Inside Glasses

Fabrication of micro-optical components by using a femtosecond laser

The interaction of femtosecond and nanosecond laser pulses with the surface of glass