Diamond-like Carbon Decoration Enhances the Field Electron Emission of Silicon Nanowires

Fei Zhao,Dan-Dan Zhao,Shao-long Wu,Guo-an Cheng,Rui-ting Zheng
DOI: https://doi.org/10.1016/j.surfcoat.2012.05.104
2013-01-01
Abstract:Diamond-like carbon decorated silicon nanowires (DLC-SiNWs) have been fabricated using magnetic filtered vacuum plasma deposition process at room temperature on SiNW array substrates. DLC-SiNWs are composed of uniformly distributed amorphous carbon and a few diamond nano-grains, in which there are more than 70% sp(3) bonds in the carbon film. The turn-on field (E-on) of DLC-SiNWs changes with the thickness increase of DLC layer. E-on of DLC-SiNWs with a thickness of 60 nm reches at a lowest value, i.e. 4.36 V/mu m, which is better than the original SiNWs. These indicate that the field emission (FE) property of SiNWs decorated with a suitable thickness DLC is enhanced due to the work function reducing of the tip of SiNWs, at which the amorphous carbon phase layer embedded with a few diamond nano-particles has been decorated. (C) 2012 Elsevier B.V. All rights reserved.
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