Abstract:Radio-frequency (RF) contacts-which are an example of electrical contacts-are commonly employed on accelerators and nuclear fusion experimental devices. RF contacts with a current load of 2 kA for steady-state operation were designed for application to the International Thermonuclear Experimental Reactor (ITER) device. In contrast to the typical working conditions of general commercial electrical contacts, those of RF contacts employed on fusion devices include high vacuum, high temperature, and neutron radiation. CuCrZr is currently of interest as a base material for the manufacture of louvers of RF contacts, which has excellent thermal and electrical properties and has low creep rate at 250 {\textdegree}C. In this study, a hard Au coating (Au-Ni) was electroplated on CuCrZr samples and the samples were then subjected to thermal aging treatment at 250 {\textdegree}C for 500 h in order to simulate the vacuum-commissioning process of the ITER. The effects of thermal aging on the hardness, elastic modulus, crystallite size, and compositions of the coating were investigated via microstructural and mechanical characterizations of the coating material. Metal atom migration in different coating layers during thermal aging was characterized and evaluated via scanning electron microscopy/energy dispersive X-ray spectroscopy observations of the cross-sectional surfaces, and the obtained results could be used to directly select the coating thickness for the final RF contact component. The contact resistance-an important parameter of the RF contact-was measured in a dedicated testbed built to simulate fusion reactor conditions between CuCrZr pins and stainless steel plates coated with Au-Ni and Rh, respectively.

Fabrication and Thermal Stability Characterisation of Ru Electrode Used for High Power Contact Radio Frequency Microelectromechanical System Switch

Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices

Improving Performance of the Metal-to-metal Contact RF MEMS Switch with a Pt–Au Microspring Contact Design

Characterizations of thermal stability and electrical performance of Au-Ni coating on CuCrZr substrate for high vacuum radio-frequency contact application

Implementation of Highly Reliable Contacts for RF MEMS Switches

Mechanism Study of Low-Resistance Ohmic Contact in Cr/Au Electrodes on (100) Β-Ga2o3 Substrate with Rapid Thermal Annealing

Novel Multicontact Radio Frequency Microelectromechanical System Switch in High-Power–handling Applications

Novel Process for Fabrication of RF MEMS Switch with High Mechanical Reliability

Study On The Nano-Topography Of The Electrode Surface And The Breakdown Voltage In Rf Mems Switches

Cu Contact on NiSi/Si with a Ru/TaN Barrier Stack

Study on Pt-Rh Composite Thin Film Electrode for High Temperature Saw Device

Electro-thermally actuated RF MEMS switch for wireless communication.

Copper-Based Multimetal-Contact Rf Mems Switch

Temperature Effects in Packaged RF MEMS Switches with Optimized Gold Electroplating Process

Characterization of Thermal Stability of RuMoC Films as Seedless Cu Diffusion Barriers in Damascene Structures for Cu Interconnects

Thermal Stability of Ruzr Alloy Thin Films As the Diffusion Barrier in Cu Metallization

In Situ Interface Characterization of Arcing Electrode Materials and Evolution in Electrical Endurance Experiments

Thermal stability investigation for Ohmic contact properties of Pt, Au, and Pd electrodes on the same hydrogen-terminated diamond

The research on improving the anti-oxidation of tungsten rhenium alloy wires

Effect of Deposition Pressure and Temperature on Tungsten Thin-Film Heater for Phase-Change Switch Applications

Intermittent Failure Mechanism and Stabilization of Microscale Electrical Contact