The Effect of Different TSV Electroplating Levelers on the Copper Residual Stress

Ciyan Wu,Xue Feng,Haiyong Cao,Huiqin Ling,Ming Li,Dali Mao
DOI: https://doi.org/10.1109/icept-hdp.2012.6474651
2012-01-01
Abstract:Levelers have great influence on residual stress of electrodeposited film used in TSV. In this study, 2-MP (2-mercaptopyridine), JGB (Janus green B) and 2-ABT (2-aminobenzothiazole) are used as levelers to study the effects of different levelers on residual stress. The film stress deposited with different levelers decreases in the order of 2-MP, JGB and 2-ABT and closely related to grain size. Grain size is 15nm, 80nm, 150nm with 2-MP, JGB, 2-ABT respectively. So the larger the grain size, the smaller the tensile stress. Levelers inhibitory decreases in the order of 2-MP, JGB and 2-ABT and higher inhibitory of levelers induce finer grains. Preferred planes change from (200), (111) to (220) with increasing 2-MP and JGB in the solution. The texture coefficient of (220) plane keeps increasing with increasing of 2-ABT concentration. The film surface is rough with 2-MP and JGB as levelers while the surface is smooth with 2-ABT as levelers.
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