The saturation density property of (B)InAs/GaAs quantum dots grown by metal-organic chemical vapor deposition

Tianhe Li,Qi Wang,Xin Guo,Zhigang Jia,Pengyu Wang,Xiaomin Ren,Yongqing Huang,Shiwei Cai
DOI: https://doi.org/10.1016/j.physe.2012.01.002
2012-01-01
Physica E: Low-Dimensional Systems and Nanostructures
Abstract:The density property of InAs/GaAs quantum dots (QDs) grown by metal-organic chemical vapor deposition (MOCVD) was investigated in detail. The saturation density of InAs/GaAs QDs was experimentally demonstrated. The InAs deposition thickness (InAs coverage) when the saturation density reached was also found. Furthermore, we systemically analyzed the influences of growth temperature and growth rate of InAs/GaAs QDs on the saturation density. Finally, BInAs/GaAs QDs with room-temperature photoluminescence (RT-PL) wavelength of 1320nm and full width at half maximum (FWHM) of 40mev were achieved for the first time, and the effects of boron incorporation on InAs/GaAs QDs were studied.
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