Sharp Contrast of the Density and Size of Ga Metal Droplets on Photolithographically Patterned GaAs (100) by Droplet Epitaxy under an Identical Growth Environment

Ming-Yu Li,Jihoon Lee,Zhiming Wang,Yusuke Hirono,Jiang Wu,Sangmin Song,Sang-Mo Koo,Eun-Soo Kim,Gregory J. Salamo
DOI: https://doi.org/10.1002/pssa.201127692
2012-01-01
physica status solidi (a)
Abstract:A sharp contrast of the density and size of Ga metal droplets (MDs) on strip patterned GaAs (100) is demonstrated through droplet epitaxy (DE) and photolithography technique. As clearly evidenced by scanning electronic microscope (SEM) and atomic force microscope (AFM), MD density between etched (patterned) and un‐etched (un‐patterned) surfaces can be sharply different up to one order of magnitude under an identical growth condition. Etched surface exhibits much higher density and smaller diameter and height of MDs.
What problem does this paper attempt to address?