Abstract:By pulsed laser deposition (PLD) method ferroelectric BaTiO3 nanofilms were grown on Si substrates coated by nanoporous alumina membranes (NAMs) with an average pore size of 20 nm,and metal Pt nanowires were embedded in NAMs as a part of the bottom electrode. The dielectric and ferroelectric properties,and microstructure of the BaTiO3 nanofilms were characterized. The results showed that the dielectric constant of the BaTiO3 nanofilms with a thickness of 170 nm,decreased slowly from 400 to 350 as the measured frequency was increased from 103 Hz to 106 Hz,and that the dielectric loss increased slowly from 0.029 to 0.036 in the low frequency range from 103 Hz to 105 Hz,whereas quickly increased up to 0.07 at high frequencies over 105 Hz. Such a phenomenon was resulted from the dielectric dipolar polarization in the BaTiO3 nanofilms. Polarization-electric field hysteresis loop indicated that the remanent polarization and the coercive field of the BaTiO3 nanofilms were 17 μC/cm2 and 175 kV/cm,respectively. Cross-sectional (scanning) transmission electron microscopy (TEM) images demonstrated that the BaTiO3 nanofilms contacted directly with the Pt nanowires,and the interface between them had some degree of waviness. Both selected area electron diffraction and high-resolution TEM images confirmed that the BaTiO3 nanofilms were the tetragonal phase with a perovskite structure. After post-annealing and crystallization of the BaTiO3 nanofilms,some Pt nanowires became branches at their ends due to the re-growth of the Pt nanowires. A suitable post-annealing temperature is the critical processing parameter of fabricating ferroelectric ordered nanostructures as considering a trade-off between the ordered metal nanowires within NAMs and the crystallinity of ferroelectric nanofilms.

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