Abstract:Display Omitted We develop a single-side microcavity-diaphragm-channel one-step formation process.Small sized piezoresistor-based micro flow-sensor is fabricated with the low-cost, high-yield technique.The IC-foundry compatible bulk-micromachining process has been transferred to a foundry company.The fabricated micro flow-sensor can be directly packaged into microfluidic systems with SMT technology.The micro flow-sensor exhibits high performance. A novel low-cost and high-yield fabrication method for piezoresistor-based micro flow sensor is presented and developed. The IC-foundry-compatible microcavity-diaphragm-channel one-step formation process is implemented only from the front-side of a single (111) silicon wafer to facilitate the micro flow sensor directly packaged into microfluidic systems with low cost surface mounting technology (SMT). With only one lithographic mask, this composite structure of the microcavity-diaphragm-channel is constructed by etching rows of microholes, coating the vertical microhole-sidewall, removing the coating at the microhole-bottom, defining the sacrificial gap and lateral underetch release along {110} and {211} orientations. Finally, the composite structure can be sealed by depositing low-stress polysilicon to refilling the microholes, without the need for double-sided micromachining process, Cavity-SOI process, and wafer bonding technique. Based on the microcavity-diaphragm-channel structure, the micro flow sensor is fabricated and the performance is measured, exhibiting a sensitivity of 12.9mV (µL/min)-1 for a 0-6µLmin-1 measured range (under DC 5-V supply), non-linearity of about 0.2% FS, and the flow rate resolution better than 45nlmin-1. In addition to the advantages of the high-performance and low cost batch-fabrication, the microcavity-diaphragm-channel one-step formation process can be widely used to fabricate many other MEMS-based microfluidic structure.

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