Silicon Microdisk Resonator-Based Active Devices Using Embedded P-N Diodes

Xiaomeng Sun,Linjie Zhou,Jingya Xie,Zhi Zou,Liangjun Lu,Xinwan Li,Jianping Chen

DOI: https://doi.org/10.1364/iont.2012.if2a.1

2012-01-01

Abstract:We experimentally demonstrate microdisk resonator-based active devices using embedded p-n diodes. Transmission spectra with various forward and reverse biases reveal the microdisk resonances can be tuned with both blue- and red-shift.

What problem does this paper attempt to address?

A Dissipative Self-Sustained Optomechanical Resonator on a Silicon Chip

J. G. Huang,Y. Li,L. K. Chin,H. Cai,Y. D. Gu,M. F. Karim,J. H. Wu,T. N. Chen,Z. C. Yang,Y. L. Hao,C. W. Qiu,A. Q. Liu

DOI: https://doi.org/10.1063/1.5009402

IF: 4

2018-01-01

Applied Physics Letters

Abstract:In this letter, we report the experimental demonstration of a dissipative self-sustained optomechanical resonator on a silicon chip by introducing dissipative optomechanical coupling between a vertically offset bus waveguide and a racetrack optical cavity. Different from conventional blue-detuning limited self-oscillation, the dissipative optomechanical resonator exhibits self-oscillation in the resonance and red detuning regime. The anti-damping effects of dissipative optomechanical coupling are validated by both numerical simulation and experimental results. The demonstration of the dissipative self-sustained optomechanical resonator with an extended working range has potential applications in optomechanical oscillation for on-chip signal modulation and processing.
Silicon-on-insulator Electro-Optically Tunable Waveguide-Coupled Microdisk Resonators with Selectively Integrated P-I-n Diodes

LJ Zhou,AW Poon

DOI: https://doi.org/10.1109/group4.2005.1516390

2005-01-01

Abstract:We report silicon-on-insulator electro-optically tunable microdisk resonators with selectively integrated p-i-n diodes. Using free-carrier plasma dispersion effect, we show that the whispering-gallery modes can be blueshifted by 0.4 nm upon I-V forward bias.
Vertically Stacked Silicon Nitride Coupled Microdisk Resonators

Chenxuan Yin,Jian Jian,Zengkai Shao,Yanfeng Zhang,Pengfei Xu,Lin Liu,Chunchuan Yang,Hui Chen,Yujie Chen,Siyuan Yu

DOI: https://doi.org/10.1364/acpc.2015.asu2a.27

2015-01-01

Abstract:We investigate novel vertically-coupled SiNx microdisk resonators formed by multiple SiNx microdisk resonators stacked on top of each other separated by interleaving SiO2 layers with experimental results on optical coupling near 1550 nm.
Silicon Electro-Optic Modulators Using P-I-n Diodes Embedded 10-Micron-diameter Microdisk Resonators.

Linjie Zhou,Andrew W. Poon

DOI: https://doi.org/10.1364/oe.14.006851

IF: 3.8

2006-01-01

Optics Express

Abstract:We demonstrate a silicon electro-optic modulator using a 10-micron-diameter microdisk resonator with a laterally integrated p-i-n diode surrounding essentially the entire microdisk. Our experiments reveal a modulation bandwidth of 510 MHz using a Q ~ 16,900 resonance mode under a square-wave drive voltage of ~0.9 V forward bias and ~-6 V reverse bias.
Microring And Microdisk Resonator Integrated Circuits On A Silicon Chip

Andrew W. Poon,Linjie Zhou,Chao Li,Nick K. Hon,Hui Chen

DOI: https://doi.org/10.1117/12.707849

2007-01-01

Abstract:We report our latest experimental and numerical work on silicon microresonator passive and electro-optic active devices. On the passive device front, we demonstrate an electrically tunable silicon microring notch filter for converting 3.6-Gbps non-return-to-zero (NRZ) data format to return-to-zero (RZ)-like data format. We show that the converted RZ-like data quality highly depends on the notch filter extinction ratios. On the active device front, we demonstrate a silicon microring modulator using a double-coupled U-bend waveguide as a feedback and a pair of laterally integrated injection-type p-i-n diodes for bias/signal modulation. We show that the microring modulator extinction ratios are electrically controlled by applying a DC-bias across either the feedback-waveguide or the microring while applying a modulation signal across the other p-i-n diode. We also propose silicon microdisk modulators with selectively integrated depletion-type Schottky diodes. Our numerical simulations suggest that the microdisk structures can be advantageous compared with microring structures. We show that electrical rise time on the order of a few ps is feasible using microdisks. We also allude to on-going work on extending the microresonator devices discussed here to building functional silicon optoelectronics integrated circuits.
Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Kang Xiong,Xi Xiao,Yingtao Hu,Zhiyong Li,Tao Chu,Yude Yu,Jinzhong Yu

DOI: https://doi.org/10.1117/12.920503

2011-01-01

Abstract:We propose and demonstrate a novel elliptical microdisk resonator which enables single-mode operation with high quality (Q) factor. Such elliptical microdisk resonators with pedestal, which consist of plenty of smoothly changing bends with modified curvature radii, can easily achieve single-mode operation due to selective losses introduced by mode transmission mismatches and small curvature radii portion inside the elliptical microdisks. We fabricated the devices on silicon-on-insulator (SOI) platform. Single-mode resonance with high quality factor (Q) of ~105 was experimentally realized. Besides, the proposed elliptical microdisk provides larger coupling strength compared to normal circular microdisk, and hence enables critical coupling with easy-to-fabricate gaps.
Silicon Micro-Cavities And Their System Applications

Min Qiu,Qiang Li,Ziyang Zhang,Fangfei Liu,Qingjiang Chang,Yikai Su

DOI: https://doi.org/10.1117/12.813540

2009-01-01

Abstract:We experimentally demonstrate resonance-splitting and enhanced notch as a result of the mutual mode coupling in silicon ring resonator. Dense wavelength conversions, wavelength multicasting and optical up-converter are demonstrated in the split silicon ring resonator. A temporal differentiator and format conversion from NRZ to AMI are demonstrated utilizing the filtering effect of ring resonator. Photonic phase shifter and delay line are demonstrated utilizing the phase shift of ring resonator.
Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Xiaohui Li,Ziyang Zhang,Qiang Li,Min Qiu,Yikai Su

DOI: https://doi.org/10.1117/12.804230

2008-01-01

Abstract:In this work, we have analyzed, fabricated and demonstrated concentric micro-ring resonators in silicon-on-insulator (SOI) structure for enhanced transmission notches. The operation principles of the concentric ring resonators are studied by time-domain coupled-mode theory. Directional coupling between concentric rings offers another freedom in designing deep notch optical filters and ultra-sensitive biosensors. The finite-difference-time-domain (FDTD) simulations have shown the improvement of the notch depth, evenly distributed mode field and the effect of the resonance shift. The device is demonstrated in silicon-on-insulator structure. Transmission notch depth improvement of ~ 15dB is demonstrated for the 21-20.02-μm-radius double-ring structure comparing with the single 21-μm-radius ring.
A Silicon Quasi‐dos Based on Reverse‐biased Pn Diode

Yong Zhao,Haifeng Shao,Ting Hu,Ping Yu,Jianyi Yang,Minghua Wang,Xiaoqing Jiang

DOI: https://doi.org/10.1002/mop.26618

IF: 1.311

2012-01-01

Microwave and Optical Technology Letters

Abstract:An interference-type silicon waveguide device, which uses the particularity of the overlap between the optical field and the depletion layer in the reverse-biased pn diode, has presented a digital response characteristic. Using this characteristic, a quasi-digital optical switch is proposed and discussed. (C) 2012 Wiley Periodicals, Inc. Microwave Opt Technol Lett 54:635-638, 2012; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26618
Silicon Electro-optic Modulators Based on p-i-n Diodes Integrated Microdisk and Microring Resonators

Linjie Zhou,Andrew W. Poon

DOI: https://doi.org/10.1109/CLEO.2006.4628291

2006-01-01

Abstract:We report silicon electro-optic modulators based on p-i-n diodes integrated microdisk and microring resonators. Our experiments demonstrate a 380-MHz 20-micron-size microdisk modulator and a 1-GHz 50-micron-size microring modulator, using ±1 V driving voltages. © 2006 Optical Society of America OCIS codes: (230.5750) Resonators; (230.4110) Modulators Recently, silicon electro-optic modulators based on p-i-n diodes integrated microresonators have attained telecommunication-relevant GHz bandwidth (1). Although the principle of light intensity modulation through free carrier dispersion induced resonance wavelength shifts has been well recognized, the detailed bandwidth-limiting effects of such p-i-n diodes integrated microresonator-based modulators have yet been thoroughly addressed. Here we study p-i-n diodes integrated silicon microdisk and microring electro-optic modulators in order to distinguish the bandwidth limitations imposed by free carrier transitions and resonance linewidths. Fig.1. (a) Top-view scanning electron micrograph of a silicon electro-optic modulator based on a p-i-n diodes integrated 20-µm-diameter microdisk resonator. (b) Measured multimode throughput spectrum of the microdisk modulator at zero drive voltage. (c) Top-view scanning electron micrograph of a silicon electro-optic modulator based on a p-i-n diodes integrated 50-µm-diameter microring resonator. (d) Measured singlemode throughput spectrum of the microring modulator at zero drive voltage. In: input-port, Th: throughput-port.
Integrated tunable silicon photonic devices for optical filter and delay applications

linjie zhou,xiaomeng sun,jingya xie,l lu,zhi zou,jianping chen

DOI: https://doi.org/10.1117/12.2006143

2013-01-01

Abstract:We present our recent work on integrated silicon photonic devices for optical filter and delay applications. A microdisk resonator integrated with interleaved p-n junctions is demonstrated. The resonance can be both blue- and red-shifted by applying a forward current or a negative voltage, respectively. A MZI-nested microring resonator is shown capable of coupling tuning, enabled by a p-i-p junction based thermal heater across the waveguide. We also investigate cascaded self-coupled optical waveguide (SCOW) resonators. Electromagnetically-induced transparency (EIT)-like resonances are generated featuring a narrow lineshape and a high group delay. Finally, we present an athermal lattice filter made up of 10 cascaded Mach-Zehnder interferometer (MZI) units and show that the temperature sensitivity can be considerably reduced.
Waveguide-coupled Square Micropillar Resonator-based Devices: Channel Filters and Electro-optic Switches with Embedded p-i-n Diodes

Chao Li,Linjie Zhou,Poon, A.W.

DOI: https://doi.org/10.1109/ICTON.2006.248525

2006-01-01

Abstract:We report our numerical calculations and initial experiments on waveguide-coupled square micropillar resonator-based devices. Our calculations using two-dimensional finite-difference time-domain simulations and Fourier analysis show that waveguide coupling to a micropillar with a long flat coupling sidewall enables desirable directional wavevectors in the micropillar, and thus potentially gives rise to preferentially coupled modes in waveguide-coupled large-size square micropillar resonators. Our initial experiments on silicon-based waveguide-coupled large-size square micropillar resonator-based filters, with tailored cavity corners, reveal only 2-3 modes. We also experimentally demonstrate injection-type square micropillar resonator-based silicon electro-optic switches using laterally integrated p-i-n diodes across the entire square microcavity. By applying a 4 V forward-bias driving voltage, we obtain a resonance wavelength blueshift of ~0.54 nm. We measure the device bandwidth to be about 2 MHz, primarily limited by a wide intrinsic region
Silicon-on-insulator Electro-Optically Tunable Microring Resonators with Gear-Shaped P-I-n Diodes

Hong Wei,Sheng Chuanxiang,Chen Qian

DOI: https://doi.org/10.1117/12.970538

2012-01-01

Abstract:In this paper, a novel electron node for microring is analyzed based on plasma dispersion modulation effect. The gearshaped double-sector electron node is designed for microring embedded with resonator disks (MERD). Silvaco, twodimensional (2-D) semiconductor device simulator, has been used to analyze the relationship between concentration changes of free hole (electron) and output voltage. The optical investigation was carried out by CMT tools, giving rise to a complete evaluation of the electro-optically properties for our device. We simulate three positions of the MERD cross section with two dopant concentrations. The results show that spacing between electron nodes has important impact to resonator frequency shift. Fixing the concentrations of P and N at 1e20/cm3, the resonator frequency shift can be reached to 0.09nm when the spacing between electron nodes is 2 µm.
Experimental Demonstration of a Flexible-Grid 1×2 Wavelength-Selective Switch Based on Silicon Microring Resonators.

Weiwei Chen,Hao Lu,Shiqi Li,Pengjun Wang,Shixun Dai,Tianjun Yang,Bohao Zhang,Ruolan Yu,Qiang Fu,Jun Li,Yan Li,Tingge Dai,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1364/ol.44.000403

IF: 3.6

2019-01-01

Optics Letters

Abstract:An integrated flexible-grid 1 x 2 wavelength-selective switch based on reconfigurable add-drop silicon microring resonators using strip waveguides is designed and experimentally demonstrated. By flexibly tuning the resonance of microring resonators and path phase differences via the thermooptic effect, the transmission spectra with adjustable bandwidths can be formed as desired at the output ports. Our experimental results reveal that the fabricated flexiblegrid 1 x 2 wavelength-selective switch provides crosstalk lower than -1039 dB. The 3-dB bandwidth varies from 0.38 nm to 1 nm, the in-band ripple is less than 0.52 dB, and the response time is about 17.6 mu s. (C) 2019 Optical Society of America
Microdisk resonator assisted all-optical switching with improved speed using a reverse-biased p-n diode

jingya xie,linjie zhou,xinwan li,jianping chen

DOI: https://doi.org/10.1016/j.optcom.2015.01.010

IF: 2.4

2015-01-01

Optics Communications

Abstract:We present a compact and power efficient all-optical switching using a silicon microdisk resonator integrated with a p-n junction. We study the dependence of free-carrier lifetime, one of the most critical parameters to determine the switching speed, on reverse bias, optical intensity, and p-n junction position and dimension. Our experiments reveal that the carrier lifetime decreases with the increasing reverse bias, consistent with the theoretical results. The all-optical switching of a 211-1 non-return-to-zero pseudo-random binary sequence (PRBS) signal at a data rate of 10Gbits/s is demonstrated with p-n junction reversely biased at −15V and the pump power being 5.96dBm.
Silicon Electro-Optic Switches using Microring Resonators with Phase-Tunable Feedback

Linjie Zhou,Poon, A.W.

DOI: https://doi.org/10.1109/GROUP4.2006.1708227

2006-01-01

Abstract:We report a silicon electro-optic switch using a microring resonator with phase-tunable feedback. We show a wide mode spacing of four-times the ring free-spectral range. The carrier-induced blue-shifted resonance maintains a high extinction ratio
High-performance Silicon PIN Diode Switches in the 2-Μm Wave Band.

Chunlei Sun,Maoliang Wei,Bo Tang,Hui Ma,Peng Zhang,Ye Luo,Jialing Jian,Lan Li,Hongtao Lin

DOI: https://doi.org/10.1364/ol.453786

2022-01-01

Abstract:The 2-µm wave band has attracted significant research interest due to its potential applications for next-generation high-capacity optical communication and sensing. As the key component, fast optical switches are essential for an advanced and reconfigurable optical network. Motivated by this prospect, we propose and demonstrate two typical silicon PIN diode switches at 2 µm. One is based on a coupled microring resonator (CMRR), and the other is based on a Mach-Zehnder interferometer (MZI) with a push-pull-like configuration. The measured insertion loss of the CMRR switch is <2.5 dB, and the cross talk is <-10.8 dB. The insertion loss of the MZI switch is <2 dB, and the cross talk is <-15.6 dB. The switch times of these two structures are both lower than 12.5 ns.
Broad Tuning of Whispering-Gallery Modes in Silicon Microdisks

Jeffrey M. Shainline,Gustavo Fernandes,Zhijun Liu,Jimmy Xu

DOI: https://doi.org/10.1364/oe.18.014345

2010-01-01

Abstract:Silicon microdisks with dynamically-tunable resonance spectra are achieved with nanoscale, in-plane silicon electrical contacts in a single lithographic step. Electrical current is passed through the devices to enable thermal tuning via joule heating. A 14nm wavelength shift is demonstrated with 1.6mW power consumption in devices with >20nm free spectral ranges and quality factors exceeding 20,000. Spectral shifts equal to a full width at half maximum can be achieved with approximately 10microW tuning power for a mode with quality factor of 20,000.
Electrically Tunable Fano Resonance Line Shapes By Using Racetrack Microresonator-Coupled Mach-Zehnder Interferometers With Embedded P-I-N Diodes

Linjie Zhou,Andrew W. Poon

DOI: https://doi.org/10.1109/ICTON.2006.248536

2006-01-01

Abstract:We report our initial experimental demonstration of electrically tunable Fano resonance line shapes by using racetrack ring microresonator-coupled Mach-Zehnder interferometers with embedded p-i-n diodes on silicon-on-insulator substrates. Fano resonance observed at the interferometer output ports is due to interference between the guided lightwave that is coupled to the microresonator and the coherent lightwave guided in the interferometer reference arm. We apply a relative phase shift to the interferometer reference arm by current injection, thereby electrically tuning the Fano resonance line shape through free carrier plasma dispersion effect. Our initial experiments reveal different characteristic sharp asymmetrical resonance line shapes upon application of less than IV forward biases across the embedded p-i-n diode.
High-Q Silicon Nitride Few-Mode Microdisk Resonators

Yuan Chen,Zhiqiang Fan,Yang,Yue Lin,Di Jiang,Xiang Li,Qi Qiu

DOI: https://doi.org/10.1109/lpt.2023.3344875

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:High-Q silicon nitride microdisk resonators (MDRs) with fewer resonant modes are proposed and experimentally demonstrated. The proposed MDRs consist of microdisks and optimized bent bus waveguides. The introduction of asymmetric directional couplers (DCs) successfully destroys part of high-order modes resonance and enhances that of TE1 and TE2 radial modes so that the spectral purity of the MDRs is improved. In this way, guided-modes propagate in MDRs with low loss and > 10(6) Q-factors are obtained. The maximum measured loaded Q-factor and intrinsic Q-factor is 4.7 x 10(6 )and 5.9 x 10(6), respectively. The minimum wavelength interval between two notches is 0.68 nm. The proposed few-mode MDRs are realized with one step silicon nitride etching process provided by a multiproject wafer foundry and they have broad application prospects in integrated microwave photonic systems, sensing, and other fields.

Silicon Microdisk Resonator-Based Active Devices Using Embedded P-N Diodes

A Dissipative Self-Sustained Optomechanical Resonator on a Silicon Chip

Silicon-on-insulator Electro-Optically Tunable Waveguide-Coupled Microdisk Resonators with Selectively Integrated P-I-n Diodes

Vertically Stacked Silicon Nitride Coupled Microdisk Resonators

Silicon Electro-Optic Modulators Using P-I-n Diodes Embedded 10-Micron-diameter Microdisk Resonators.

Microring And Microdisk Resonator Integrated Circuits On A Silicon Chip

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Silicon Micro-Cavities And Their System Applications

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

A Silicon Quasi‐dos Based on Reverse‐biased Pn Diode

Silicon Electro-optic Modulators Based on p-i-n Diodes Integrated Microdisk and Microring Resonators

Integrated tunable silicon photonic devices for optical filter and delay applications

Waveguide-coupled Square Micropillar Resonator-based Devices: Channel Filters and Electro-optic Switches with Embedded p-i-n Diodes

Silicon-on-insulator Electro-Optically Tunable Microring Resonators with Gear-Shaped P-I-n Diodes

Experimental Demonstration of a Flexible-Grid 1×2 Wavelength-Selective Switch Based on Silicon Microring Resonators.

Microdisk resonator assisted all-optical switching with improved speed using a reverse-biased p-n diode

Silicon Electro-Optic Switches using Microring Resonators with Phase-Tunable Feedback

High-performance Silicon PIN Diode Switches in the 2-Μm Wave Band.

Broad Tuning of Whispering-Gallery Modes in Silicon Microdisks

Electrically Tunable Fano Resonance Line Shapes By Using Racetrack Microresonator-Coupled Mach-Zehnder Interferometers With Embedded P-I-N Diodes

High-Q Silicon Nitride Few-Mode Microdisk Resonators