Abstract:The use of the Silicon-on-Insulator (SOI) platform has been prominent for realizing CMOS-compatible, high-performance photonic integrated circuits (PICs). But in recent years, the silicon-nitride-on-silicon-dioxide (SiN-on-SiO$_2$) platform has garnered increasing interest as an alternative to the SOI platform for realizing high-performance PICs. This is because of its several beneficial properties over the SOI platform, such as low optical losses, high thermo-optic stability, broader wavelength transparency range, and high tolerance to fabrication-process variations. However, SiN-on-SiO$_2$ based active devices such as modulators are scarce and lack in desired performance, due to the absence of free-carrier based activity in the SiN material and the complexity of integrating other active materials with SiN-on-SiO$_2$ platform. This shortcoming hinders the SiN-on-SiO$_2$ platform for realizing active PICs. To address this shortcoming, we demonstrate a SiN-on-SiO$_2$ microring resonator (MRR) based active modulator in this article. Our designed MRR modulator employs an Indium-Tin-Oxide (ITO)-SiN-ITO thin-film stack, in which the ITO thin films act as the upper and lower claddings of the SiN MRR. The ITO-SiN-ITO thin-film stack leverages the free-carrier assisted, high-amplitude refractive index change in the ITO films to effect a large electro-refractive optical modulation in the device. Based on the electrostatic, transient, and finite difference time domain (FDTD) simulations, conducted using photonics foundry-validated tools, we show that our modulator achieves 280 pm/V resonance modulation efficiency, 67.8 GHz 3-dB modulation bandwidth, $\sim$19 nm free-spectral range (FSR), $\sim$0.23 dB insertion loss, and 10.31 dB extinction ratio for optical on-off-keying (OOK) modulation at 30 Gb/s.

Silicon-on-insulator Electro-Optically Tunable Microring Resonators with Gear-Shaped P-I-n Diodes

Silicon-on-insulator Electro-Optically Tunable Waveguide-Coupled Microdisk Resonators with Selectively Integrated P-I-n Diodes

Modeling And Analysis Of Silicon-On-Insulator Elliptical Microring Resonators For Future High-Density Integrated Photonic Circuits

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Design and Optimization of Optical Modulators Based on Graphene-on-silicon Nitride Microring Resonators

Silicon Electro-optic Modulators Based on p-i-n Diodes Integrated Microdisk and Microring Resonators

Optoelectronic Oscillator Based on a Silicon Microring Modulator

Microring And Microdisk Resonator Integrated Circuits On A Silicon Chip

Silicon Electro-Optic Modulators Using P-I-n Diodes Embedded 10-Micron-diameter Microdisk Resonators.

On-chip Microwave Signal Generation Based on a Silicon Microring Modulator.

Optical Ring-Resonator Modulator Based on 0.8 Μm CMOS Technology

Channel-Selectable Optical Link Based on a Silicon Microring for On-Chip Interconnection

Ultra-High Dynamic Extinction Ratio Electro-Optical Modulator with Coupled Microring on SOI Platform

Optimization and Simulation of an Electro-Optic Polymer Microring Resonator Switch Array

A Silicon Nitride Microring Based High-Speed, Tuning-Efficient, Electro-Refractive Modulator

Fabrication of Depletion Type Micro-Ring Modulator with High Extinction Ratio and High Coupling Quality Factor

Silicon Electro-Optic Switches using Microring Resonators with Phase-Tunable Feedback

A Silicon Nitride Microring Modulator for High-Performance Photonic Integrated Circuits

Silicon-Based Microring Resonator Modulators for Intensity Modulation

Embedded Ring Resonators for Microphotonic Applications

Electro-optic OR/NOR Directed Logic Device at 10 GHz Based on Carrier-Depletion Silicon Microring Resonators