Low Loss Optical Modulator Based on Slot-Loaded Waveguide for Unmodified CMOS Process

Wei Tan,Qifeng Long,Zhijuan Tu,Xingjun Wang,Huaxiang Yi,Zhiping Zhou
DOI: https://doi.org/10.1117/12.2001228
2012-01-01
Abstract:We propose a novel optical modulator based on poly-on-silicon slot-loaded waveguide to fit the CMOS process and it demonstrated a large loss reduction from 54.2dB/cm to 22.9dB/cm numerically compared with strip-loaded waveguide structure.
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