Fabrication of Supersmooth Optical Elements with Low Surface and Subsurface Damage

Zhan Guangda,Shen Zhengxiang,Ma Bin,Wang Xiaoqiang,Wang ZhanShan,Liu Huasong,Ji Yiqin

DOI: https://doi.org/10.1117/12.979649

2012-01-01

Abstract:Bowl feed polishing technique still plays a very important role in the manufacturing of supper smooth optical components in industry because of low cost and high productivity. A superpolishing process based on the bowl feed technique with fine ceria hydrosol slurries is presented in this paper, which is a viable method to generate supersmooth surface meets the strict requirements of low surface and subsurface damage. A concept of super-smooth surfaces machining "Process Controlling" is introduced, which takes super-smooth surfaces machining as a chain consisted of some key nodes. Moreover, the samples were etched by Hydrofluoric acid solution to reduce the residual subsurface damage produced in previous procedure, when after fine grinding and lapping process. Meanwhile, using hydro-selection technique, the average abrasive size of polish slurry decreases remarkably, and the distribution become more uniform, which is helpful to get low surface roughness. In order to reduce the fine scratches of the top surface produced during the polishing process, the slurry is intervened exposures to ultrasonic vibration to prevent the self-reunition of the fine polishing abrasives. Finally, the middle frequency roughness of the samples, almost without scratches and pits left on the surface, is less than 0.3nm Rms, the high frequency roughness is better than 0.158 nm rms, and the subsurface damage is less than 1mircon.