Superpolishing of Crystals

谢会东,王晓青,沈光球
DOI: https://doi.org/10.3969/j.issn.1000-985x.2004.06.034
2004-01-01
Abstract:Supersmooth surfaces are of great importance to the modern science and technology. Superpolishing techniques are main ways to make supersmooth surfaces. The definition of supersmooth surfaces and the factors influencing the superpolishing quality are presented in this paper. The feature, the level achieved, the measurements and evaluation of the superpolishing techniques are introduced briefly. In addition, the past, present and future of the superpolishing techniques are detailed.
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