Abstract:Many high-precision optical components are made of glass, but they can also be made of a wide variety of other materials. For example, reaction-bonded silicon carbide (RB-SiC) has recently been used to make optical parts for poor working conditions due to its distinct properties such as low density, high hardness, and low thermal expansion coefficient. Thus, in order to rapidly manufacture high-precision aspherical mirrors made from RB-SiC, a novel aspheric manufacturing system equipped with magnetorheological finishing (MRF) technology is described in this paper, which incorporates a host of features and has unprecedented processing versatility. The system has four degrees of freedom, and can realize manufacture or measurement based on the Cartesian coordinate or polar coordinate systems. To achieve good surface accuracy, the polishing wheel combines self-rotation movement with corotation. The prepolishing and fine polishing processes can be done on the same machine by changing different process parameters accordingly, and the on-machine profilometer measures the aspheric forms generated during prepolishing. Experiments were carried out on the features of magnetorheological (MR) fluids by polishing a parabolic SiC mirror with a Phi 100 mm aperture. The results indicated that the required convergence speed, surface roughness, and figure accuracy can be achieved with high efficiency. The final surface roughness with an initial value of Ra = 34.39 nm reached 26.74 nm after 20 hours of prepolishing using MR fluids carrying oil (Al2O3 as the nonmagnetic particle), and then reached 1.14 nm after 50 hours of fine polishing using the MR fluid with diamond power as the nonmagnetic particle. The figure accuracy also improved to lambda 130 rms (lambda = 632.8 nm) at an arbitrary Phi 30 mm subaperture.

Magnetic Bingham Fluid-Assisted Deterministic Polishing for Super-Smooth Surfaces

Incined Magnetorheological Finishing and Its Path Controlling

Magnetorheological Finishing Technology for Polishing Super-Smooth Optical Surfaces

Surface Roughness and Material-Removal Rate with Magnetorheological Finishing Without Subsurface Damage of the Surface

Optimizing Parameters for Magnetorheological Finishing Supersmooth Surface

Nano-Precision Synergistic Finishing Process Integrated ELID-Grinding and MRF

Influences of polishing tool's shape on surface roughness in magneto-rheological finishing

Influence of the Shape of Polishing Tools on the Surface Roughness in Magneto-rheological Finishing

Effects of Horizontal Vibration Assistance on Surface Roughness in Magnetic Abrasive Finishing

Magnetorheological Finishing for Aspheric Surface with Nanometer Accuracy

Perpendicular Axis Magnetorheological Finishing of Spherical Optics

Magnetorheological Finishing of Optical Surface Combined with Symmetrical Tool Function

Development and Feature Investigation of Oil-Base Magnetorheological Fluid

Study on magnetorheological nano-polishing using low-frequency alternating magnetic field

Analyzing and Improving Surface Texture by Dual-Rotation Magnetorheological Finishing

Morphology characterization of polishing spot and process parameters optimization in magnetorheological finishing

Electrochemical magnetorheological finishing for hard-to-machine functional materials with nanometer-scaled surface roughness

Process Technology of Aspherical Mirrors Manufacturing with Magnetorheological Finishing

Figure Error Correction of Ultra-Precision Optical Surfaces by Dual-Rotation Magnetorheological Finishing

High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon

Magnetorheological Finishing of SiC Aspheric Mirrors