Abstract:Many high-precision optical components are made of glass, but they can also be made of a wide variety of other materials. For example, reaction-bonded silicon carbide (RB-SiC) has recently been used to make optical parts for poor working conditions due to its distinct properties such as low density, high hardness, and low thermal expansion coefficient. Thus, in order to rapidly manufacture high-precision aspherical mirrors made from RB-SiC, a novel aspheric manufacturing system equipped with magnetorheological finishing (MRF) technology is described in this paper, which incorporates a host of features and has unprecedented processing versatility. The system has four degrees of freedom, and can realize manufacture or measurement based on the Cartesian coordinate or polar coordinate systems. To achieve good surface accuracy, the polishing wheel combines self-rotation movement with corotation. The prepolishing and fine polishing processes can be done on the same machine by changing different process parameters accordingly, and the on-machine profilometer measures the aspheric forms generated during prepolishing. Experiments were carried out on the features of magnetorheological (MR) fluids by polishing a parabolic SiC mirror with a Phi 100 mm aperture. The results indicated that the required convergence speed, surface roughness, and figure accuracy can be achieved with high efficiency. The final surface roughness with an initial value of Ra = 34.39 nm reached 26.74 nm after 20 hours of prepolishing using MR fluids carrying oil (Al2O3 as the nonmagnetic particle), and then reached 1.14 nm after 50 hours of fine polishing using the MR fluid with diamond power as the nonmagnetic particle. The figure accuracy also improved to lambda 130 rms (lambda = 632.8 nm) at an arbitrary Phi 30 mm subaperture.

Magnetorheological Finishing of Optical Surface Combined with Symmetrical Tool Function

Incined Magnetorheological Finishing and Its Path Controlling

Influences of polishing tool's shape on surface roughness in magneto-rheological finishing

Influence of the Shape of Polishing Tools on the Surface Roughness in Magneto-rheological Finishing

Magnetorheological Finishing Technology for Polishing Super-Smooth Optical Surfaces

Magnetorheological Finishing for High-Precision Optical Surface

Perpendicular Axis Magnetorheological Finishing of Spherical Optics

Optimizing Parameters for Magnetorheological Finishing Supersmooth Surface

Surface Roughness and Material-Removal Rate with Magnetorheological Finishing Without Subsurface Damage of the Surface

Experimentation on MR Fluid Using a 2-Axis Wheel Tool

Magnetorheological Finishing of SiC Aspheric Mirrors

Magnetorheological Finishing for Aspheric Surface with Nanometer Accuracy

Magnetic Bingham Fluid-Assisted Deterministic Polishing for Super-Smooth Surfaces

Process Technology of Aspherical Mirrors Manufacturing with Magnetorheological Finishing

Deterministic Magnetorheological Finishing of Optical Aspheric Mirrors

Model of the Material Removal Function and an Experimental Study on A Magnetorheological Finishing Process Using A Small Ball-End Permanent-Magnet Polishing Head

A combination process of magnetorheological finishing and computer controlled optical surfacing on single-crystal silicon surface

Planar Oscillation-Enabled Deterministic Magnetorheological Micro-Polishing

Renewable Magnetorheological Finishing Tool Combined Self-Rotation and Co-Rotation Movement

Study on magnetorheological nano-polishing using low-frequency alternating magnetic field

Post processing for magnetorheological finishing of optical mirrors