Indium Compositional Homogeneity in In$_{0.17}$Al$_{0.83}$N Epilayers Grown by Metal Organic Chemical Vapor Deposition

Jiaming Wang,Fujun Xu,Chengcheng Huang,Zhengyu Xu,Xia Zhang,Yan Wang,Weikun Ge,Xinqiang Wang,Zhijian Yang,Bo Shen,Wei Li,Weiying Wang,Peng Jin
DOI: https://doi.org/10.1143/apex.5.101002
IF: 2.819
2012-01-01
Applied Physics Express
Abstract:The spatial distribution features of indium composition in In0.17Al0.83N epilayers have been investigated by means of cathodoluminescence and photoluminescence. It is demonstrated that there is excellent compositional homogeneity in In0.17Al0.83N, implying there is almost no phase separation that would cause compositional inhomogeneity. This result is quite different from the case in InxGa1-xN alloys. Based on the analysis of the temperature–mole fraction (T–x) phase diagram, we believe that the In0.17Al0.83N alloy is metastable against local decomposition. The high kinetic energy barrier caused by the considerable covalent bond mismatch between Al–N and In–N is supposed to account for the realization of such a metastable state.
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