Simulation Analysis of SMR with Tetrahedral Amorphous Carbon As High Impedance Material of Bragg Reflection

陆晓欣,朱嘉琦,王赛,刘罡,刘远鹏,袁欣薇,霍施宇
DOI: https://doi.org/10.3969/j.issn.1001-9731.2012.14.015
2012-01-01
Journal of Functional Biomaterials
Abstract:To improve the electricity and acoustic quality of solidly mounted resonator(SMR),realize the new application of tetrahedral amorphous carbon(ta-C) in the field of bulk acoustic wave device,a SMR was designed with ta-C as the high acoustic impedance Bragg reflector,which to simulate the effect of the Bragg reflector to the properties of SMR,as well as the influence of the sp3 fraction in ta-C and the error of thickness of high/low acoustic impedance layers on quality factor(Q) by MathCAD.The simulation results showed that the quality of SMR was improved with the increase of Bragg reflectors.With higher sp3 fraction,saturated Q factor can be reached with fewer layers,and there should be only six layers(three pairs) in order to get an excellent Q factor when the sp3 fraction in ta-C was 80%.The thickness error of high/low acoustic impedance layers closer to the piezoelectric stack had greater effect to Q factor.So the design of SMR with high frequency(8GHz) and low loss has been realized.
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