A Compact CMOS Compatible Oxide Antifuse with Polysilicon Diode Driver

Jin He,Wan Tim Chan,Cheng Wang,Haijun Lou,Ruonan Wang,Lin Li,Hailang Liang,Wen Wu,Yun Ye,Yutao Ma,Qin Chen,Xiaomeng He,Mansun Chan
DOI: https://doi.org/10.1109/ted.2012.2201941
IF: 3.1
2012-01-01
IEEE Transactions on Electron Devices
Abstract:A very compact one-time-programmable memory consisting of an oxide antifuse and a polysilicon diode driver is proposed in this brief. The memory cell is constructed using a standard CMOS process without any additional masks to reduce the fabrication cost. The design method to achieve the required performance of various components is presented in detail. The technology has been demonstrated with a fabricated chip from a standard 0.18- $\mu\hbox{m}$ CMOS TSMC technology.
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