Crystallization Process of in Situ Annealed Ge2Sb2Te5 Films

Lei Zhang,Xiaodong Han,Ze Zhang
DOI: https://doi.org/10.1016/j.jallcom.2012.05.007
IF: 6.2
2012-01-01
Journal of Alloys and Compounds
Abstract:Electron-diffraction radial distribution function (RDF) was used as a structural probe to study the process of crystallization of Ge2Sb2Te5 (GST) films annealed in situ. The GST thin film began to crystallize after a characteristic peak of 0.52 nm appeared in the RDF, indicating the formation of third nearest neighbour ordering. The GST films preferentially form uniform nanosized grains. The similarities and differences in the structures of the amorphous phases and the polycrystalline phases are described. (C) 2012 Elsevier B.V. All rights reserved.
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