Abstract:Nanostructured titanium oxide films were deposited on silicon substrate via sol-gel dip coating method with tetrabutyl titanate as precursor. With reflective spectroscopic ellipsometry, the ellipsometric parameters Ψ and Δ of TiO2 films were measured. Then, with the Cauchy model, the ellipsometric data were fitted, and both the thickness and the optical constants at 380—800 nm wavelength of the films were obtained. A comparison was made between the reflectance of the films derived with the spectrophotometer and the simulated results. Meanwhile, the thickness of the films was calculated by interference method. Moreover, with the atomic force microscopy the surface microstructures of the films annealed at different temperatures were observed, and the relationship between the surface microstructures and optical constants of films was further discussed. The results showed that Cauchy model works well in describing the dispersion relationship of the TiO2 films, and the variation rules of optical constants （the refractive index, the extinction coefficient） with wavelength were obtained. The optical constants of the films were related with the microstructure. Those simulated reflectance spectrum accorded well with the measured result. And with a deviation of only 25%, the calculated value of the thickness was in accordance with which was obtained by spectroscopic ellipsometry.

Study on TiO2 thin film by spectroscopic ellipsometry

Spectroscopic Ellipsometry Characterization of Tio2 Thin Films Prepared by the Sol-Gel Method

Study on TiO2 Thin Films and Their Optical Properties by Spectroscopic Ellipsometry

APPLICATION AND OPTICAL PROPERTIES OF TiO_2 THINFILMS PREPARED BY CHEMICAL VAPOUR DEPOSITION

Optical Constants of Sol-Gel Derived Tio2 Films Characterized by Spectroscopic Ellipsometry

Optical Properties Of Tio2 Thin Film Grown On Quartz Substrate By Sol-Gel Method

Investigation on the Microstructure and Optical Performance of TiO_2 Films by Sol-Gel Method

Study of the Crystal Structure, Band Gap and Dispersion Evolution in Titanium Oxide Thin Films

Characterization and optical propagation loss of sol-gel derived TiO2/SiO2 films

Structural Properties Characterization of TiO2 Thin Films Prepared by Sol-Gel Process on Si and Ge Based Substrates

Structural and optical properties of TiO2 thin films prepared by spin coating

FTIR and XPS Investigation of Er-doped SiO2–TiO2 Films

Preparation and Study of Oriented TiO2 Thin Film

Optical Properties of TiO2 Thin Films Derived by Sol- Gel Method

Study on Structural, Optical and Hydrophilic Properties of FTO/TiO2 Tandem Thin Film Prepared by Aerosol-Assisted Chemical Vapor Deposition Method

Tuning of Electrical and Optical Properties of Tantalum Doped TiO2 Flims Prepared by Sol-gel Method

Thickness Dependent Optical Properties of Titanium Oxide Thin Films

Structure and optical properties of TiO2 thin films deposited by ALD method

Characterization of TiO2 film prepared by sol-gel method using Ti(OC4H9)4

Structure-related infrared optical properties of BaTiO3 thin films grown on Pt/Ti/SiO2/Si substrates

Electronic and Optical Properties of TiO2 Thin Films: Combined Experimental and Theoretical Study