Abstract:Thin films of SiO2–TiO2 composite oxides with various SiO2:TiO2 compositions were prepared by the sol-gel method, using tetraethylorthosilicate (TEOS) and titanium tetraisopropoxide (TTIP) as precursors. The composition, crystal structure, and chemical bonding configuration of the as-deposited and annealed SiO2–TiO2 thin films were analyzed using Rutherford backscattering spectrometry (RBS), glancing incident angle x-ray diffraction (GIAXRD) and Fourier transform infrared spectroscopy (FTIR), respectively. Optical properties of the films were characterized by spectroscopic ellipsometry and ultraviolet-visible spectrophotometry. The Si/Ti ratios in the SiO2–TiO2 films agree with the TEOS/TTIP molar ratio in the sol-gel precursor. When the TEOS/(TEOS + TTIP) ratio is greater than 40%, the SiO2–TiO2 thin films remain amorphous (without formation of TiO2 crystalline phase) after annealing at temperatures as high as 700 °C. FTIR spectra indicate that the quantity of Si–O–Ti bonding can be maximized when the TEOS:TTIP in the precursor is 80%:20%. The refractive index of the SiO2–TiO2 films increases approximately linearly to the mixing ratio of TTIP/(TEOS + TTIP). However, SiO2-rich films possess higher ultraviolet-visible transmittance than the TiO2-rich films. The modification of microstructure and chemical bonding configuration in the SiO2–TiO2 films by the composition and its influence on the optical properties are discussed.

Spectroscopic Ellipsometry Characterization of Tio2 Thin Films Prepared by the Sol-Gel Method

Study on TiO2 thin film by spectroscopic ellipsometry

Optical Constants of Sol-Gel Derived Tio2 Films Characterized by Spectroscopic Ellipsometry

Crystallization Behavior and Hydrophilic Performances of V2O5–TiO2 Films Prepared by Sol–gel Dip-Coating

Investigation on the Microstructure and Optical Performance of TiO_2 Films by Sol-Gel Method

Optical Properties Of Tio2 Thin Film Grown On Quartz Substrate By Sol-Gel Method

Structural Properties Characterization of TiO2 Thin Films Prepared by Sol-Gel Process on Si and Ge Based Substrates

Characterization of TiO2 film prepared by sol-gel method using Ti(OC4H9)4

Optical Properties of TiO2 Thin Films Derived by Sol- Gel Method

Characterization and optical propagation loss of sol-gel derived TiO2/SiO2 films

Study on TiO2 Thin Films and Their Optical Properties by Spectroscopic Ellipsometry

Compositional Tailored Sol-Gel SiO2–TiO2 Thin Films: Crystallization, Chemical Bonding Configuration, and Optical Properties

Sol-Gel Synthesis and Characterization of Ceox-Sio2-Tio2 Thin Films

FTIR and XPS Investigation of Er-doped SiO2–TiO2 Films

Preparation and Characterization of TiO2 Nanometer Thin Films by Sol-gel Process

Structure and Grain-Size Distribution of Tio2/Sio2 Thin Film

Preparation and properties of TiO2 photocatalytic thin film

Optical properties of TiO2 and Mn0.2Ti 0.8O2 thin films

Preparation and structure analyses of TiO2 thin films by sol-gel processing

Sol-Gel Preparation and Optical Nonlinearity of CdS Microcrystallite-Doped SiO2-TiO2thin Films

XPS STUDY ON TiO2 PHOTOCATALYTIC THIN FILM PREPARED BY THE SOL-GEL METHOD