Fabrication Of Holographic Microlenses Using A Deep Uv Lithographed Zone Plate

H Ming,Y Wu,J Xie,T Nakajima
DOI: https://doi.org/10.1364/AO.29.005111
IF: 1.9
1990-01-01
Applied Optics
Abstract:Holographic microlens arrays and elliptical zone plates are fabricated on holographic plates and photoresists by interference between the first- and second-order diffracted waves from an ion etched Fresnel zone plate, which is made by electron-beam scanning and deep UV lithography. This method of fabrication is simple, and a holographic lens with a large numerical aperture and short focal length is obtained. Experimental results of focusing and imaging by a lens array and an elliptical zone plate are given. Two methods of fabricating holographic zone plates for an IR or UV wavelength are also proposed.
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