Polyhedral Oligomeric Silsequioxane Monolayer As A Nanoporous Interlayer for Preparation of Low-K Dielectric Films

Ying-Ling Liu,Chuan-Shun Liu,Chin-I Cho,Ming-Jyh Hwu
DOI: https://doi.org/10.1088/0957-4484/18/22/225701
IF: 3.5
2007-01-01
Nanotechnology
Abstract:Polyhedral oligomeric silsequioxane (POSS) monomer was fixed to a silicon surface by reacting octakis( glycidyldimethylsiloxy) octasilsesquioxane (OG-POSS) with the OH-terminated silicon surface in the presence of tin (II) chloride. The POSS cage layer then served as a nanoporous interlayer to reduce the dielectric constants of polyimide films on silicon surfaces. The chemical structure and surface morphology of OG-POSS modified silicon surfaces were characterized with XPS. With the introduction of a POSS nanopored interlayer, the dielectric constants of polyimide films were reduced.
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