Study of Structure and Optical Properties of Silver Oxide Films by Ellipsometry, XRD and XPS Methods

XY Gao,SY Wang,J Li,YX Zheng,RJ Zhang,P Zhou,YM Yang,LY Chen

DOI: https://doi.org/10.1016/j.tsf.2003.11.242

IF: 2.1

2004-01-01

Thin Solid Films

Abstract:AgxO samples prepared in different O2 gas ratio conditions and annealed at different temperatures have been studied by the spectroscopic ellipsometry, XRD and XPS methods. The optimal O2/(O2+Ar) gas ratio for the sample preparation will be in the range 0.5–0.6, in which the optical constants become less changed. During annealing, the as-deposited amorphous structure of AgxO will be crystallized and the temperature-dependent decomposition will occur. The threshold of the decomposition temperature for AgO and Ag2O is approximately 200 °C and 300 °C, respectively. The results indicate that the samples annealed at the low and high O2/(O2+Ar) gas ratio will have different structures, and the structure of Ag2O is more stable with a lower oxygen diffusion rate in decomposition for the sample prepared in the higher O2 gas ratio condition.