A Metal/al2o3/zro2/sio2/si (MAZOS) Structure for High-Performance Non-Volatile Memory Application

Jing Liu,Qin Wang,Shibing Long,Manhong Zhang,Ming Liu
DOI: https://doi.org/10.1088/0268-1242/25/5/055013
IF: 2.048
2010-01-01
Semiconductor Science and Technology
Abstract:In this paper, we report a metal/Al2O3/ZrO2/SiO2/Si (MAZOS) structure with a ZrO2 charge-trapping layer for non-volatile memory application. The superiority of this device over the traditional metal/Al2O3/Si3N4/SiO2/Si (MANOS) devices is much better data retention and enhanced program/erase efficiency. The MAZOS device exhibits excellent memory characteristics, including a large memory window of 7.1 V under +/- 11 V capacitance-voltage sweep, and a greatly improved data retention (only 16% charge loss for 10 years time) along with good endurance. The MAZOS device has a strong potential for future high-performance non-volatile memory application.
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