Investigation of oxidation for high quality Nb/AlOx-Al/Nb Josephson tunnel junctions

Lu Yapeng,Cao Chunhai,Li Mengyue,Xu Qinyin,Xiao Wei,Fang Yurong,Xu Weiwei,Kang Lin,Chen Jian,Wu Peiheng
DOI: https://doi.org/10.3969/j.issn.1001-7100.2012.07.008
2012-01-01
Abstract:A new method of oxidization for fabricating Nb Josephson junction with low leakage current was reported,which could improve the oxidation around the tunnel barrier effectively: the Al film conducted by plasma oxidation of oxygen ions with the help of RIE could improve the oxide quality of the film,and enforce the insulation property.The AES analysis shows that the oxide layer is uniform,the interface is clear.High quality junctions were fabricated.
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