Fabrication and properties of Nb/Al-AlO<inf>x</inf>/Nb Josephson junctions for SQUID application

Da Xu,Jinjin Li,Wenhui Cao,Jianshe Liu,Wei Chen
DOI: https://doi.org/10.1109/CPEM49742.2020.9191689
2020-01-01
Abstract:Nb/Al-AlO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</inf> /Nb Josephson junctions (JJs) were fabricated using standard photolithography technology at NIM for superconducting quantum interference device (SQUID). The current-voltage (I-V) characteristics of shunted Nb/Al-AlO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</inf> /Nb JJs and JJ array were investigated. The critical current density ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$J_{c}$</tex> ) is controlled by exposure time and oxygen pressure during the oxidation process of Al film. It is indicated that the shunted JJs are overdamped and the unshunted JJs are high quality from the I-V curve of JJ array, which are suitable for SQUID application.
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