Microfabrication of Pb-free Piezoceramic Microrod Arrays and 1–3 Type Ceramic/polymer Piezocomposite Films

Ying Xu,Jing-Feng Li
DOI: https://doi.org/10.1016/j.matlet.2009.07.006
IF: 3
2009-01-01
Materials Letters
Abstract:A microfabrication method based on MEMS technology was developed to fabricate microscale multifunctional composites with 1-3 type patterned structure by combining silicon micromolding with sol-gel processing. By this method, a microscale rod array of lead-free Na0.5K0.5NbO3 piezoelectric ceramics was fabricated, which has a feature size of 20 mu m lateral width and 30 mu m height. Piezoceramic/ epoxy composite thick films containing such an array as piezoelectric-active fillers were fabricated by vacuum infiltration, in which the piezoelectricity of the embedded Na0.5K0.5NbO3 rods was confirmed by a scanning probe system. (C) 2009 Elsevier B.V. All rights reserved.
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