Fabrication and Characterization of PZT Thick Film Actuators Array for MEMS Deformable Mirror

XU Xiao-hui,FENG Yan,LIU Shuang,LI Bao-qing,CHU Jia-ru

DOI: https://doi.org/10.3969/j.issn.1672-6030.2007.04.007

2007-01-01

Nanotechnology and Precision Engineering

Abstract:A novel MEMS deformable mirror actuated by Pb(ZrxTi1-x)O3(PZT) thick film actuators array was presented in this paper.The analytical model was established and employed for structure optimization of the bulk PZT actuator.PZT thick films were prepared by thinning bulk PZT ceramics using wet-etching method.The etchant was 1BHF∶2HCl∶4NH4Cl∶4H2O.The dielectric properties of the PZT thick films were measured using lock-in technique.The dielectric constant and dielectric loss are better than 2 400 and 3%,respectively,when the frequency is lower than 100 kHz.The piezoelectric property was measured using a fabricated piezoelectric cantilever and the results indicate that the d31 coefficient of the PZT thick films is approximately-250 pm/V.A 4×4 array prototype of 2.5 mm-diameter bulk PZT actuators was fabricated.Performances of the bulk PZT actuators were evaluated with laser Doppler vibrometer.The PZT actuators show a deformation of 2.2 μm at 100 V and resonant frequency of higher than 100 kHz.The bulk PZT actuator exhibits large stiffness.