Study and Manufacture of a Novel Micro-Deformable Mirror

Hongbin Yu,Haiqing Chen,Zimin Zhu,Chao Wang,Dacheng Zhang,Ting Li
DOI: https://doi.org/10.2351/1.5060172
2003-01-01
Abstract:In this paper the design and fabrication of a novel micro-deformable mirror based on silicon bulk micromaching technology was presented and a device was achieved successfully. The effective mirror surface was 900mm2 , which was a significant feature over others existed mirrors. The thickness of silicon membrane was 30 μm and the number of electrostatic actuators was 49. First, the mechanical model of the deformable mirror was put forward and the deformation expression was also discussed. Then the deformable mirror was fabricated by some typical silicon process such as deposition, photolithography, etching and bonding. Finally some aspect associated with process were discussed in details.
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