Superconducting Films Prepared by Electron-Cyclotron Resonance Plasma Ions Deposition

HH WEN,YY SHENG,FY ZHANG,YC SHI,ZX REN,XW CAO
DOI: https://doi.org/10.1088/0256-307x/7/10/011
1990-01-01
Chinese Physics Letters
Abstract:An Y-Ba-Cu-O superconducting film with onset temperature Tc (onset) = 91K and zero resistance temperature Tc (end) = 81.4K has been obtained for the first time by using electron cyclotron resonance (ECR) plasma ions deposition technique. The relationship between the composition of the film and the atmosphere as well as the distance between the target and substrate has also been given.
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