Abstract:Room and high temperature mechanical properties of reactive magnetron sputtered TaSiN coatings were measured using nanoindentation (between 25 °C and 500 °C). Fracture toughness was also evaluated at a similar temperature range using the micropillar splitting method. The influence of the nitrogen concentration on the evolving phases and microstructure of the TaSiN coatings, before and after the high temperature testing, were examined by X-ray diffraction (XRD) and transmission electron microscopy (TEM) analysis. XRD spectra showed broad peaks with hexagonal γ-Ta2N as the main phase, with the cubic δ-TaN phase emerging for higher N contents. Phase composition remained unchanged before and after the 500 °C tests. However, after the high temperature tests, TEM analysis showed the presence of an oxide surface layer, with a thickness that decreased (from 42 to 15 nm) with N content, due to residual oxygen diffusion, which replaces nitrogen to form amorphous SiOx. Beneath the oxide-rich surface layer, coatings exhibited a stable nanocrystalline columnar microstructure. Hardness and fracture toughness increased with N content, initially due to the formation of an amorphous Si–N tissue at grain boundaries, and for even higher N contents, due to the appearance of the hard cubic δ-TaN phase. Hardness at 500 °C decreased only by 15%, while fracture toughness followed the opposite trend, due to increased plasticity with temperature. The optimum composition turned out to be Ta55Si10N35, which retained a hardness of 30 GPa at 500 °C, being also the toughest. These observations make this system very interesting for high temperature applications.

On the Crystal Structure and Properties of TaN Monolithic Coatings Based on Different Targets

The Effect of RF Sputtering Power on Structural, Nanomechanical and Tribological Properties of Single Layered TaN Coatings

Tribological Properties of Ta‐C‐N and Ta‐N Thin Films

Influence of Nitrogen Partial Pressure on Structure, Mechanical and Tribological Properties of TaCN Coatings

High temperature mechanical properties and microstructure of hard TaSiN coatings

Influence of Modulation Period on Mechanical Property of Nanoscale TaN/NbN Multilayered Coatings

Microstructure and Mechanical Properties of TaN Thin Films Prepared by Reactive Magnetron Sputtering

Effect of gas Pressure on the Mechanical Properties of Sputtered TaN Films

Tribological properties and microstructure of monolayer and multilayer Ta coatings prepared by magnetron sputtering

Microstructure, Mechanical, and Tribological Properties of Cr-Ti-Si-N Coatings

Structural and Mechanical Properties of TaN/a-CNx Multilayer Films

Influence of Ta on Crack Susceptibility and Mechanical Properties of Laser Clad Ni-based Coating

Effects of Ta on Microstructure and Microhardness of Ni Based Laser Clad Coating

Microstructure and mechanical properties of nano-multilayer structured (AlCrMoTaTi)Nx coatings deposited by closed field unbalanced magnetron sputtering

Controlling microstructure, preferred orientation, and mechanical properties of Cr-Al-N by bombardment and alloying with Ta

Effect of working pressure on microstructure and mechanical properties of TaN/VN bilayer nanofilms

An experimental investigation on nanomechanical and nanotribological behavior of tantalum nitride coating deposited on Ti6Al7Nb alloy

Microstructures and Mechanical Properties of (Ti,Cr)N Composite Coatings Grown by Arc Ion Plating

Design of a High-Adhesion-strength and High-Toughness Ta/Ta(N) Multilayer Coating and Exploration of the Influence Exerted by Ta(N) Layer Thickness

TaN Diffusion Barrier Layers Deposited by Reactive Magnetron Sputtering

Transmission Electron Microscopy Microstructural Characterization of Ti–Si–C–N Coatings