Tribological properties and microstructure of monolayer and multilayer Ta coatings prepared by magnetron sputtering

Yongyao Su,Weijiu Huang,Tengfei Zhang,Chunbao Shi,Rong Hu,Zhenguo Wang,Lixin Cai

DOI: https://doi.org/10.1016/j.vacuum.2021.110250

IF: 4

2021-07-01

Vacuum

Abstract:<p>To improve the wear resistance of medical titanium alloy, Ta coatings were prepared by magnetron sputtering method on Ti6Al4V substrates. Phase structure and surface morphology of Ta coatings were characterized by X-ray diffraction and atomic force microscope, respectively. The properties of Ta coatings, including adhesion, nano-hardness, and wear resistance, were tested using nano-scratch, nano-indentation and tribometer, respectively. The results show that both stable body-centered cubic (<em>α</em>-Ta) phase and metastable tetragonal phase (<em>β</em>-Ta) coexist in a multi-layer structure, and it shows a non-columnar feature. Interestingly, only a pure phase with columnar crystals is found in monolayer Ta coating. A body-centered cubic (<em>α</em>-Ta) phase is found in a monolayer prepared under the pulse power bias voltage with low deposition temperature. A pure metastable tetragonal phase (<em>β</em>-Ta) is prepared under the direct current bias voltage, which has the best adhesion and wear resistance compared with other Ta coatings.</p>

materials science, multidisciplinary,physics, applied