PREPARATION AND PROPERTIES OF Ba-MO SOURCE FOR MOCVD

LI Chao-ren,ZHANg Fei,LIU Xin,XIONG Jie,TAO Bo-wan,ZHAO Xiao-hui
2013-01-01
Abstract:Metal organic chemical vapor deposition(MOCVD)process can realize continuous,rapid,uniform deposition of the Second-generation(HTS)tapes of YBa2Cu3O7-δ(YBCO)on long flexible metal substrates.The Metal Organic(MO)source is one of the key issues of preparing the YBCO superconducting films by MOCVD.MO source has been commercially producted abroad,but it is expensive,such as the price of metal-organic Ba Source is about 700yuan/g.Compared with Y dipivaloylmethanate(thd)3and Cu(thd)2,Ba(thd)2has poor volatility,poor stability and more difficulty in preparation.We reported on the study on the preparation,the stability and the evaporation property of Ba-MO source.By introducing the tetraene as subsidiary ligand,our Ba-MO source has lower volatilization temperature and greater stability.Its cost is only about$30/g,which has great significance for low cost preparation of YBCO HTS tapes.Using the self-made Ba-MO source as the precursor,the Jc of YBCO thin films prepared by MOCVD is up to 2MA/cm2(77K,0T),proving the applicability of Ba-MO source.
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