The Role of Ti Interlayer in Carbon Nanotube Growth

Chia-Chih Chuang,Wei-Long Liu,Wen-Jauh Chen,Jin-Hua Huang
DOI: https://doi.org/10.1016/j.surfcoat.2007.08.069
IF: 4.865
2007-01-01
Surface and Coatings Technology
Abstract:Vertically aligned multi-wall carbon nanotubes (CNTs) were grown on Ni/Ti/Si substrate by thermal chemical vapor deposition method in a microwave heating system. The results showed that vertically aligned CNTs could be uniformly grown on a large area substrate of 3 inch diameter. The Ti interlayer couldn't obstruct the interdiffusion of Ni and Si and the inward diffusion of O, Ti and C. The C atoms for CNTs growth were supplied from Ni particles at an early stage and from Ti interlayer at a later stage in the growth process. (c) 2007 Elsevier B.V. All rights reserved.
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