Abstract:Heteroepitaxial thin films are subjected to very large stresses, typically in the giga-Pascal range, due to lattice mismatch. Their applications in microelectronic devices have drawn a growing research effort which involves, in part, a better understanding of the processes by which defects such as cracks and dislocations are nucleated in a thin layer structure. One of the possible defect mechanisms is related to a stress-induced morphological instability which tends to roughen the film surface by mass diffusion during film growth or annealing. A major objective of this paper is to show that a few invariance properties of the strain energy density and the chemical potential in a heteroepitaxial structure can be utilized to obtain some valuable information concerning the equilibrium profile, the stress concentration and the formation of cusp-like stress singularities without having to resort to full-scale numerical studies. The process of cusp-formation requires a critical film thickness Hcr which is independent of the Matthews critical thickness herfor misfit dislocation formation by propagation of threading dislocations within the film. Calculations show that Hcr is significantly larger than hcr for a wide range of misfit strain, suggesting that nucleation of threading dislocations via cusp-formation could be critical in the overall process of strain relaxation in this type of film. Finally, a “phase” diagram is constructed to categorize important consequences of the surface evolution based on the instability wavelength and average film thickness.

Computer Simulations of the Stranski–Krastanov Growth of Heteroepitaxial Films with Elastic Anisotropy

Formation Of Surface Structures During Heteroepitaxial Thin Film Growth On Prepatterned Substrates

Three-dimensional Phase Field Simulation for Surface Roughening of Heteroepitaxial Films with Elastic Anisotropy

Anisotropy Effect on Heteroepitaxial Growth of Self-Assembled Islands

A Numerical Study of Stress Controlled Surface Diffusion During Epitaxial Film Growth

Kinetic Monte Carlo Simulation of Strained Heteroepitaxial Growth with Intermixing

SURFACE ROUGHENING OF HETEROEPITAXIAL THIN FILMS

Computer Simulation of Quantum Dot Surface under Stress

Effects of elastic heterogeneity and anisotropy on the morphology of self-assembled epitaxial quantum dots

Numerical Simulation of Diffusion Controlled Surface Evolution

Some general properties of stress-driven surface evolution in a heteroepitaxial thin film structure

Three-Dimensional Finite-Element Simulations of the Self-Organized Growth of Quantum Dot Superlattices

Off-lattice Kinetic Monte Carlo simulations of strained heteroepitaxial growth

Superlattice Growth Via MBE and Green’s Function Techniques

Heteroepitaxial Growth of Quantum Wire Arrays Through Prepatterning Substrate Surfaces

Continuum Modeling of Surface Roughening in Heteroepitaxial Structures Based on Phase Field Theory

Three-dimensional Analysis of the Guided-Assembled Growth of Heteroepitaxial Islands on Imperfectly Pre-Patterned Surfaces

Formation of Self-Assembled Heteroepitaxial Islands in Elastically Anisotropic Films

Nonlinear evolution of surface morphology in InAs/AlAs superlattices via surface diffusion

Dynamics of Self-Organized Epitaxial Island Formation under Controlled Annealing

Nonlinear effects for island coarsening and stabilization during strained film heteroepitaxy