Packaging of optical fibers using microfabricated nickel clamps

Xuhan Dai,Xiaolin Zhao,Guifu Ding,Hong Wang,Bingchu Cai
DOI: https://doi.org/10.1117/1.2896082
2008-01-01
Abstract:Reports the microfabricated nickel clamps for packaging of optical fibers in photonics devices. When the fiber is inserted into the silicon V groove, the microfricated clamps fix it in the V groove. Compared with the traditional silicon V grooves, this approach only involves one additional sputtering, photolithography, and electroplating process. Two single-mode optical fibers were fixed into the silicon V groove by the nickel clamp; the measured insertion loss is lower than 0.1 dB. (C) 2008 Society of Photo-Optical Instrumentation Engineers.
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