Abstract:This work introduces a patterned laser‐induced microjet‐assisted ablation method to achieve precise ablation on difficult‐to‐machine materials. And a reliable geometrical model is established to predict the ablation process. Therefore, microgrooves with controllable cross‐sections can be fabricated by shaping the laser spot into customized patterns. This method provides a highly flexible solution for producing diverse microstructures on difficult‐to‐machine materials. Fabricating precision microgrooves with controllable cross‐sections on difficult‐to‐machine materials is significantly valuable but still challenging. Herein, a patterned laser‐induced microjet‐assisted ablation method for cross‐sectional profiles controllable laser micromachining is proposed. During the liquid‐assisted laser ablation process, debris and bubbles that may disturb the laser energy deposition can be instantaneously expelled by a directional laser‐induced microjet. The Gaussian laser spot is spatially modulated into specific geometric shapes, such as triangles, to tune locally deposited laser energy to carve microgrooves with designed cross‐sections. To achieve customized microgrooves efficiently, a reliable geometrical model based on the ablation threshold theory is developed to guide the processing parameter selection, including the laser spot shape, polarization, pulse energy, and scanning strategies. The simulation and experimental results confirm that this method achieves the decoupled control of the groove depth and width in a single‐path laser ablation process. Using this method, the design and manufacturing of microgrooves with controllable cross‐sections on single crystalline silicon carbide are demonstrated. The patterned laser‐induced microjet‐assisted ablation method provides a new route for fabricating precision microgrooves with controllable cross‐sections on difficult‐to‐machine materials.

Fabrication of Micro Grooves on Silicon by Micro Optical Fiber Enhanced Pulse Laser Irradiation

Laser Etching of Groove Structures with Micro-Optical Fiber-Enhanced Irradiation

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Laser Wavelength Effects On(ti,al,si)n in Near-Field Laser Nanostructuring by Micron Optical Fiber Enhanced Irradiation

A method of micro laser surface texturing based on optical fiber focusing

Fabrication of micro-optical components by using a femtosecond laser

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Microfabrication by Femtosecond Laser Irradiation

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Fabrication of microstructures by picosecond laser

Generation of Supra-Wavelength Grooves in Femtosecond Laser Surface Structuring of Silicon

Patterned Laser Ablation of Microgrooves with Controllable Cross‐Sections

Femtosecond laser microfabrication of micro-optic elements in glass

Experimental Study on Femtosecond Laser Processing Performance of Single-Crystal Silicon Carbide

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Processing Microstructure on Film by Femtosecond Laser

Laser Induced Twin-Groove Surface Texturing Based on Optical Fiber Modulation